The images above illustrate a newly-developed low-cost, high-performance Raman/Photoluminescence system (Image 1) and samples under analysis. The system consists of a 532 nm/200 mW laser unit for Raman/photoluminescence excitation, a XYZ positioning sample/wafer stage, a Raman probe, a special proprietary spectrometer optimized for an advanced TEC-cooled high-sensitivity imager camera. In Image 2, Raman signal from a 4-inch Si(100) wafer is detected through an objective lens and with a 45o laser incident angle. Image 3 shows the Raman spectral measurement of isopropyl alcohol (91% IPA) in a 2-mL standard glass vial with an orthogonal green laser excitation. Image 4 shows an acetaminophen tablet during Raman spectral scan.
The system is specifically designed for semiconductor thin-film process professionals and research scientists to measure Raman and photoluminescence spectra of silicon & III-V wafers/devices, thin films and coatings, chemicals in aqueous and organic solvents, liquids/fluids or solid samples under 532 nm laser excitation. In addition, it can test samples on glass slides or 96-well micro plates for chemical, biological and surface-enhanced Raman scattering (SERS) analyses. The system can be reconfigured with a 405 nm purple laser and a wide range spectrometer for photoluminescence (PL) measurement covering the entire visible wavelength range. Electroluminescence (EL) measurement of light emitting devices can be carried out with electrical probes and instruments. Its main applications include 1) silicon, III-V semiconductors and transition metal chalcogenide 2D materials, 2) chemical, biochemical, and pharmaceutical analysis, and 3) chemical reaction kinetics and mechanisms. Its main Raman spectral features are:
- Advanced TEC deeply-cooled imager camera (>10 M pixels)
- High signal-to-noise ratio (SNR>1000)
- Long hardware integration time (up to 2000 sec) for extremely weak Raman scattered light detection
- Wide Raman shift range: 180 ~ 4400 cm-1 (1200 lines/mm grating, standard) or 180 ~ 3200 cm-1 (1800 lines/mm grating)
- Spectral resolution: 5.5 and 11.4 cm-1 FWHMs for diamond 1338 cm-1 Raman peak with 0.1 and 0.3 nm laser linewidths, respectively
- High data sample resolution: ~1 data point/cm-1
- Superb noise suppression by averaging up to 2800 pixel signals at each spectral point
- Computerized camera control, spectrograph image acquisition, image-to-spectrum extraction
- Long-pass filter rejects 99.9999% laser at 532 nm
- Switchable 90o orthogonal and 45o back-scattering Raman detection with respect to laser beam
- High detection sensitivity or lower detection limit (LDL)
- Custom-made system catered for various experiments, including 785 nm laser excitation